History

NANO-MASTER started design and development of research tools in 2000 and focused on thin film applications. NANO-MASTER products are used in Semiconductor, MEMS, Optoelectronics, Nanotechnology and Photovoltaic applications. Some of the products are PECVD Systems for deposition of SiO2, Si3N4, DLC and CNT; PA-MOCVD Systems for InGaN and AlGaN; Sputtering Systems (reactive, co-sputtering, combinatorial); Thermal and E-Beam Evaporators, Ion Beam Etching and Reactive Etching Systems; Atomic Layer Deposition Tools; Megasonic Cleaning Systems and Photoresist Stripping Equipmen

NANO-MASTER has established itself as a thin film equipment supplier around the world and sold over 150 units in 30 countries primarily to universities, research centers and leading national laboratories. NANO-MASTER employs highly skilled and educated design and manufacturing engineers, application engineers, service engineers and support personnel. NANO-MASTER’s objective is to provide top quality services while maintaining the highest level of integrity.